Ultrasonic manufacturing apparatus

ABSTRACT

The present invention pertains to a multilayer flexible wiring board. 
     The multilayer flexible wiring board including first and second patterned wiring layers, a resin film interposed between a surface of the first wiring layer and a surface of the second wiring layer, and a bump connected to the surface of the second wiring layer, wherein the resin film is adapted to form an opening when the bump to force into the resin film and an ultrasonic wave is applied to the bump and the bump is left in the opening to electrically connect the top of the bump to the first wiring layer.

This is Division of application Ser. No. 09/642,638 filed Aug. 22, 2000now U.S. Pat. No. 6,583,364.

BACKGROUND OF THE INVENTION

1. Field of Invention

The present invention relates to the field of flexible printed wiringboards, particularly to the field of flexible printed wiring boards ofmultilayer structure.

2. Description of Related Art

Recently, flexible wiring boards of multilayer structure are used inmany electronic circuits.

As an example, a process for manufacturing a multilayer flexible printedwiring board is explained. Referring to FIG. 20(a), the reference number311 represents a copper foil having a thickness of dozens ofmicrometers.

A polyimide varnish is first applied on this copper foil 311 to form abase film 312 consisting of a polyimide film (FIG. 20(b)). Then, aresist layer 313 is formed on base film 312 (FIG. 20(c)), and resistlayer 313 is patterned via photographic processes. The reference number331 in FIG. 20(d) represents an opening in resist layer 313, and basefilm 312 is exposed at the bottom of this opening 331.

Then, the part of base film 312 exposed at the bottom of opening 331 isetched off (FIG. 20(e)). Then, resist layer 313 is removed to give apatterned base film 312 (FIG. 20(f)).

In FIG. 21(g), base film 312 is inverted with copper foil 311 upward. Amasking film 317 is applied on base film 312 (FIG. 21(h)), and a resistlayer 315 is formed on copper foil 311 (FIG. 21(i)).

Then, resist layer 315 is patterned via exposure and developmentprocesses. The reference number 332 in FIG. 21(j)) represents an openingformed by patterning in resist layer 315. Copper foil 311 is exposed atthe bottom of this opening 332.

Then, copper foil 311 at the bottom of opening 332 is etched to patterncopper foil 311 into a first wiring layer 316 (FIG. 21(k)). Thereference number 333 represents the part from which copper foil 311 hasbeen removed and an opening segmenting first wiring layer 316. The topof base film 312 is exposed at the bottom of opening 333. Resist layer315 is removed (FIG. 21(l)) and a polyimide varnish is applied on thetop of first wiring layer 316 so that the polyimide varnish flows intoopening 333 in first wiring layer 316 to form a cover film 318consisting of a polyimide film having a flat surface. A resist layer 319is formed on the top of cover film 318 (FIG. 22(n)) and resist layer 319is patterned via exposure and development processes.

The reference number 334 in FIG. 22(o) represents an opening formed bypatterning in resist layer 319. Cover film 318 is exposed at the bottomof this opening 334.

Then, the part of cover film 318 located at the bottom of opening 334 isetched off with a metallic etching solution to pattern cover film 318 sothat first wiring layer 316 is exposed at the bottom of the opening 334.The etching solution used here is selected not to etch first wiringlayer 316.

Finally, resist layer 319 is removed and followed by heat treatment toimidate base film 312 and cover film 318, whereby a first single-wiringlayer board piece 310 is obtained (FIG. 22(q)).

Thus obtained first single-wiring layer board piece 310 comprises firstwiring layer 316, patterned base film 312 provided on one side of firstwiring layer 316 and patterned cover film 318 provided on the oppositeside of first wiring layer 316. Opening 333 in first wiring layer 316 isfilled with cover film 318.

The reference number 380 in FIG. 23(a) represents a second single-wiringlayer board piece to be laminated to first single-wiring layer boardpiece 310. This second single-wiring layer board piece 380 comprises abase film 381 consisting of a polyimide film, a second wiring layer 386provided on said base film 381 and a cover film 382 provided on saidsecond wiring layer 386.

Said second wiring layer 386 consists of a patterned copper foil andsaid cover film 382 consists of a polyimide film.

Second single-wiring layer board piece 380 has a plurality of bumps 384connected to second wiring layer 386 at the bottoms and projecting fromcover film 382 at the tops.

First single-wiring layer board piece 310 is opposed to the plane ofsecond single-wiring layer board piece 380 from which the tops of bumps384 project in parallel thereto, and bumps 384 are aligned with openings331 in base film 312 to bring bumps 384 into contact with the surface offirst wiring layer 316, whereby first and second wiring layers 316 and386 are connected via bumps 384.

If either one of two cover films 312, 382 includes of a thermoplasticresin having the property of developing adhesiveness upon heating, firstand second single-wiring layer board pieces 310, 380 can be bondedtogether by heating them while bumps 384 are in contact with the surfaceof first wiring layer 316. The reference number 351 in FIG. 23(b)represents a multilayer wiring board comprising first and secondsingle-wiring layer board pieces 310, 380 bonded together.

The process for forming an opening by patterning a polyimide film byetching as described above provides finer openings than laser etching ordrilling so that it is widely used in the manufacture of high-densitymultilayer flexible wiring boards in which openings should be providedwith narrow gaps.

However, the etching process using an alkali solution as described aboveinvolves complex control of the temperature or state of the solution.Particularly when etching conditions are insufficiently controlled,variation may occur in the size of openings formed in polyimide.

Moreover, the use of a resist layer consisting of a photosensitive filmfor forming an opening adds production costs.

An object of the present invention is to simplify the complexconventional process for manufacturing a multilayer wiring board asdescribed above and to provide a single-layer flexible wiring boardsuitable for preparing a multilayer flexible wiring board, the resultingmultilayer flexible wiring board, a process for manufacturing amultilayer flexible wiring board and an ultrasonic manufacturingapparatus suitable for use in the manufacturing process.

SUMMARY OF THE INVENTION

In order to attain the above object, the present invention provides aprocess for manufacturing a multilayer flexible wiring board by using afirst single-wiring layer board piece having a first patterned wiringlayer and a first resin film in close contact with said first wiringlayer, and a second single-wiring layer board piece having a secondpatterned wiring layer and a plurality of bumps connected to said secondwiring layer at the bottoms to laminate said first and secondsingle-wiring layer board pieces into a multilayer flexible wiringboard, said process comprising bringing the top of each of said bumpsinto contact with said first resin film, applying ultrasonic wave to atleast one of said first and second single-wiring layer board pieces toforce into said first resin film in contact with said each bump to forman opening, and bringing said each bump into contact with said firstwiring layer to electrically connect said first and second wiring layersvia said each bump.

According to this aspect of the present invention, said each bump may beultrasonically vibrated in the direction along the surface of said firstresin film.

According to the present invention, said application of ultrasonic wavemay be continued after the top of said each bump comes into contact withsaid first wiring layer to ultrasonically bond said each bump to saidfirst wiring layer.

According to the present invention, said first and second wiring layersand said bumps may consist of a metal material based on copper, andeither one or both of the surface of at least the top of said each bumpor the surface of said first wiring layer in contact with at least thetop of said each bump may be coated with a metal material based on oneor more metals selected from gold, silver, platinum, palladium, tin,zinc, lead, nickel or iridium.

According to the present invention, said application of ultrasonic wavemay be carried out under pressure.

According to the present invention, said first resin film may include athermosetting resin and may be precured before an opening is formed bysaid each bump.

According to the present invention, said first resin film may include athermosetting polyimide film.

According to the present invention, said each bump may be brought intocontact with said first resin film to apply ultrasonic wave after asecond resin film is provided on the side of said second wiring layerhaving said bumps in such a manner that said second resin film is inclose contact with said second wiring layer and the top of said eachbump projects above said second resin film.

According to the present invention, at least the surface of said secondresin film may include a resin developing adhesiveness upon heating.

According to the present invention, said second resin film may be heatedduring said application of ultrasonic wave.

According to the present invention, at least the surface of said secondresin film may consist of a thermoplastic polyimide film.

According to the present invention, said each bump may have a sizeexpressed as the sectional area parallel to said second wiring layer of19.6×10⁻⁸ m² or less at maximum.

The present invention also provides a process for manufacturing amultilayer flexible wiring board by using a first single-wiring layerboard piece having a first patterned wiring layer and a first resin filmin close contact with said first wiring layer, and a secondsingle-wiring layer board piece having a second patterned wiring layerand a plurality of bumps connected to said second wiring layer at thebottoms to laminate said first and second single-wiring layer boardpieces into a multilayer flexible wiring board, said process comprisingbringing a projection on an ultrasonic manufacturing apparatus intocontact with said first resin film, applying ultrasonic wave to saidprojection to force into said first resin film by said projection toform an opening, and then bringing the top of each of said bumps of saidsecond single-wiring layer board piece into contact with said firstwiring layer at the bottom of said opening.

According to this aspect of the present invention, said first wiringlayer may be exposed at the bottom of said opening.

According to the present invention, said ultrasonic manufacturingapparatus may have a plurality of said projections to form a pluralityof said openings in said first resin film by a single application ofultrasonic wave.

According to the present invention, said each projection may beultrasonically vibrated in the direction along the surface of said firstresin film.

According to the present invention, said first resin film may be formedby applying a liquid raw material on said first wiring layer and curingit by heating, and said opening may be formed in said first resin filmin a cured state.

According to the present invention, an adhesive film developingadhesiveness upon heating may be applied after said opening is formed,and said first and second single-wiring layer board pieces may be bondedtogether via said adhesive film.

The present invention also provides a multilayer flexible wiring boardcomprising first and second patterned wiring layers, a first resin filminterposed between said first and second wiring layers, and a bumpconnected to said second wiring layer at the bottom, wherein said firstresin film has an opening formed by applying ultrasonic wave to saidbump to force into it and said bump is left in said opening toelectrically connect the top of said bump to said first wiring layer.

According to this aspect of the present invention, a plurality of saidopenings may be provided and said bump may be left in said each opening.

According to the present invention, said first resin film may include aresin developing adhesiveness upon heating.

According to the present invention, the top of said each bump and saidfirst wiring layer may be ultrasonically bonded to each other.

According to the present invention, the surface of the top of said eachbump or the surface of said first wiring layer to be connected to thetop of said each bump may be coated with a metal material based on oneor more metals selected from gold, silver, platinum, palladium, tin,zinc, lead, nickel or iridium.

The present invention also provides a multilayer flexible wiring boardcomprising first and second patterned wiring layers, a first resin filminterposed between said first and second wiring layers, and a pluralityof bumps connected to said second wiring layer at the bottoms, whereinsaid first rein film has a plurality of openings formed by applyingultrasonic wave to a projection of an ultrasonic manufacturing apparatusto force into it and each of said bumps is located in each of saidopenings to electrically connect the top of said each bump to said firstwiring layer.

According to this aspect of the present invention, said each opening mayhave an area of 19.6×10⁻⁸ m² or less.

The present invention also provides an ultrasonic manufacturingapparatus comprising an ultrasonic wave generator generating ultrasonicvibration and a resonator transmitting said ultrasonic vibration,wherein said resonator has a plurality of projections capable ofsimultaneously coming into contact with a flat surface of a work.

According to this aspect of the present invention, an ultrasonic wavevibrating in the direction parallel to said flat surface of said workmay be applied to said each projection.

According to the present invention, said each projection may have a sizeexpressed as the cross sectional area parallel to said second wiringlayer of 19.6×10⁻⁸ m² or less at maximum. When a shape of the bumphaving a size as cross sectional area parallel to said second wiringboard of 19.6×10⁻⁸ m², or a shape of the opening having same size assaid bump is circle, for example, the diameter of circle is 5×10⁻⁴ m orless. When the diameter of the projection formed semisphere is 5×10⁻⁴ mor less, the projection height is 2.5×10⁻⁴ m or less. Therefore, the H₁of bump height and projection height are 2.5×10⁻⁴ m or less.

According to the present invention, said ultrasonic wave generator maybe oblique to said flat surface of said work.

When said ultrasonic manufacturing apparatus is used to form a pluralityof openings in a first single-wiring layer board piece having a firstpatterned wiring layer and a first resin film in close contact with saidfirst wiring layer, said each projection may be provided at the locationcorresponding to the location of each bump on a second single-wiringlayer board piece to be bonded to said first single-wiring layer boardpiece.

According to this embodiment of the present invention, said resonatormay be replaceable.

The present invention also provides an ultrasonic manufacturingapparatus comprising an ultrasonic wave generator generating ultrasonicvibration and a resonator transmitting said ultrasonic vibration,wherein said resonator has a pressing face to be pressed against a flatsurface of a work and said resonator is oblique to said flat surface ofsaid work when said pressing face is pressed against said flat surfaceof said work.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1(a)-(g) shows a process for manufacturing a first single-wiringlayer board piece for use in a multilayer flexible wiring boardaccording to the present invention.

FIGS. 2(a)-(e) shows early steps of a process for manufacturing a secondsingle-wiring layer board piece for use in a multilayer flexible wiringboard according to the present invention.

FIGS. 3(f)-(j) shows the subsequent steps.

FIGS. 4(k)-(n) shows the subsequent steps.

FIG. 5 shows an ultrasonic manufacturing apparatus according to thepresent invention.

FIG. 6 shows an alternative ultrasonic manufacturing apparatus accordingto the present invention.

FIGS. 7(a)-(c) shows a process for manufacturing a multilayer flexiblewiring board according to the present invention.

FIGS. 8(a),(b) shows the step of further multiplying said multilayerflexible wiring board.

FIGS. 9(a)-(d) shows a process for manufacturing an alternativesingle-wiring layer board piece according to the present invention and aprocess for manufacturing a multilayer flexible wiring board using saidsingle-wiring layer board piece.

FIGS. 10(a)-(f) shows a process for manufacturing a multilayer flexiblewiring board according to the present invention before an opening isformed.

FIGS. 11(g)-(i) shows the step of forming an opening according to thepresent invention.

FIGS. 12(j)-(m) shows steps after an opening is formed according to thepresent invention.

FIGS. 13(a),(b) shows a process for manufacturing a multilayer flexiblewiring board according to the present invention.

FIGS. 14(a),(b) shows a process for manufacturing an alternativemultilayer flexible wiring board according to the present invention.

FIG. 15 shows an alternative ultrasonic manufacturing apparatusaccording to the present invention.

FIG. 16 is an enlarged view of its head portion.

FIG. 17 shows a still alternative ultrasonic manufacturing apparatusaccording to the present invention.

FIG. 18 is an enlarged view of its head portion.

FIGS. 19(a)-(d) shows embodiments of the opening according to thepresent invention.

FIGS. 20(a)-(f) shows early steps of a process for manufacturing asingle-wiring layer board piece for use in a multilayer flexible wiringboard.

FIGS. 21(g)-(l) shows the subsequent steps.

FIGS. 22(m)-(q) shows the subsequent steps.

FIGS. 23(a),(b) shows a process for manufacturing a multilayer flexiblewiring board.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

First, a single-wiring layer board piece of the present invention and aprocess for manufacturing it are explained.

The reference number 11 in FIG. 1(a) represents a metal film consistingof a copper foil. A polyimide varnish including a polyimide precursor isapplied on said metal film 11 to form a base film 12 including apolyimide film (FIG. 1(b)).

Then, a resist layer 13 is formed on the opposite side of metal film 11(FIG. 1(c)) and patterned. The reference number 31 in FIG. 1(d)represents an opening in the patterned resist layer 13. Then, resistlayer 13 is used as a mask and the assembly is immersed into an etchingsolution to etch metal film 11, whereby metal film 11 exposed at thebottom of opening 31 is removed. As a result of this etching, metal film11 is patterned to form a first wiring layer 16 as shown in FIG. 1(e).During etching of metal film 11, base film 12 is not etched.

Resist layer 13 is removed (FIG. 1(f)), and a polyimide varnish havingthe same composition as above is applied on first wiring layer 16 sothat the polyimide varnish flows into opening 32 in first wiring layer16 to form a cover film 17 including a polyimide film having a flatsurface all over the surface of first wiring layer 16.

Finally, base film 12 and cover film 17 are imidated by heat treatmentinto a first single-wiring layer board piece 10 shown in FIG. 1(g). As aresult of imidation, base film 12 and cover film 17 have been cured.

Then, a second single-wiring layer board piece to be laminated to firstsingle-wiring layer board piece 10 is explained.

Referring to FIG. 2(a), a metal film 81 consisting of a copper foil isprepared and a protective film 82 is applied to the bottom of metal film81 while a UV-exposable mask film 83 is applied to the top. Then, maskfilm 83 is patterned by photographic processes and developmentprocesses. Metal film 81 is exposed at the bottoms of a plurality ofopenings 91 formed by patterning in mask film 83 (FIG. 2(c)).

When current is applied across the assembly immersed in a copper platingsolution in this state, copper grows at the top of metal film 81 exposedat the bottom of each opening 91 to form a bump 84 of copper in eachopening 91 (FIG. 2(d)).

Each bump 84 is connected to metal film 81 at the bottom and projectsabove mask film 83 at the top. Each bump 84 grows over opening 91 abovemask film 83 and becomes greater than opening 91. Each bump 84 normallyhas a maximum size at the part in contact with mask film 83.

Opening 91 is normally in the form of a circle having a diameter between100 μm and 250 μm, and the maximum diameter of bump 84 taken along thedirection parallel to metal film 81 is about 200 μm for opening 91having a diameter of 100 μm or about 500 μm for opening 91 having adiameter of 250 μm.

Therefore, the cross area of bump 84 taken along the direction parallelto metal film 81 is between 3.14×10⁻⁸ m² and 19.6×10⁻⁸ m².

Although only one bump 84 is shown in FIG. 2(d), a plurality of bumps 84are formed on metal film 81 to correspond to a plurality of openings 91.

Then, mask film 83 and protective film 82 are removed so that aplurality of bumps 84 are upright on one side of metal film 81 as shownin FIG. 2(e).

In this state, a carrier film 85 is applied on the opposite side to theside on which bumps 84 are formed (FIG. 3(f)). Then, a polyimide varnishincluding a polyimide precursor is applied and dried on the side onwhich bumps 84 are formed, whereby an insulating layer 87 _(a) includinga polyimide layer is formed (FIG. 3(g))

Then, an adhesive polyimide varnish is overcoated on insulating layer 87_(a) to form an adhesive layer 87 _(b), whereby a cover film 87including a double-layer polyimide film is obtained (FIG. 3(h)). Thesurface of this cover film 87 has the property of developingadhesiveness upon heating and insulation.

This cover film 87 is thicker on the surface of metal film 81 andthinner on the top of bump 84. Thus, the part of each bump 84 projectingabove cover film 87 is exposed when an alkali solution is sprayed on thesurface of cover film 87 to etch the surface of cover film 87 (FIG.3(i)).

Then, carrier film 85 on the bottom of metal film 81 is separated (FIG.3(j)), and instead a resist layer is formed and patterned by exposureand development.

The reference number 88 in FIG. 4(k) represents the resist layerpatterned to have a plurality of openings 91. The surface of metal film81 is exposed at the bottom of each opening 91.

Metal film 81 exposed at the bottom of each opening 91 is etched in thisstate from the bottom side to pattern metal film 81 in conformity to thepattern of resist layer 88.

The reference number 86 in FIG. 4(l) represents a second wiring layerformed by patterning in metal film 81. The reference number 92represents an opening segmenting second wiring layer 86.

Then, resist layer 88 is removed (FIG. 4(m)) and a polyimide varnishincluding a polyimide precursor is applied on the surface of wiringlayer 86 so that the polyimide varnish flows into opening 92 in wiringlayer 86 to form a base film 89 including a polyimide film having a flatsurface. The reference number 80 in FIG. 4(n) represents a secondsingle-wiring layer board piece having base film 89.

Next, a process for manufacturing a multilayer wiring board using saidfirst and second single-wiring layer board pieces 10, 80 is explained.

The reference number 50 in FIG. 5(a) represents an ultrasonicmanufacturing apparatus according to the present invention.

This ultrasonic manufacturing apparatus 50 comprises a platform 56, twoguide posts 57 ₁, 57 ₂ upright on platform 56, a cylindrical ultrasonicwave generator 51 fitted to be vertically movable to guide posts 57 ₁,57 ₂, and a resonator 52 attached to an end of ultrasonic wave generator51.

A flat support 58 is mounted on platform 56 and a first single-wiringlayer board piece 10 is placed on the top of support 58 with base film12 downward and cover film 17 upward.

The reference number 80 ₁ in FIG. 7(a) represents a second single-wiringlayer board piece. This second single-wiring layer board piece 80 ₁ hasa plurality of bumps 84 ₁ of almost the same height in contact withcover film 17 of first single-wiring layer board piece 10 at the tops.First and second single-wiring layer board pieces 10, 80 ₁ aresuperposed in this state.

Resonator 52 has a head portion 54 having a flat pressing face 59 to becontacted with a work. FIG. 5(b) shows an enlarged view of head portion54. Pressing face 59 to be contacted with a work is in parallel with thesurface of support 58. When a cylinder 53 on ultrasonic manufacturingapparatus 50 is activated so that ultrasonic wave generator 51 andresonator 52 vertically descend along guide posts 57 ₁, 57 ₂, headportion 54 comes into close contact with second single-wiring layerboard piece 80 ₁ (FIG. 7(b)).

When ultrasonic wave generator 51 is activated to generate ultrasonicwave while second single-wiring layer board piece 80 ₁ is pressedagainst first single-wiring layer board piece 10 by head portion 54, theultrasonic wave is transmitted to resonator 52 to apply ultrasonicvibration from head portion 54 of resonator 52 to second single-wiringlayer board piece 80 ₁.

First single-wiring layer board piece 10 on support 58 is fixed in thisstate so that a plurality of bumps 84 ₁ simultaneously ultrasonicallyvibrate in the direction parallel to the surface of first single-wiringlayer board piece 10, whereby each bump 84 ₁ forces into the resinconstituting cover film 17 of first single-wiring layer board piece 10to penetrate into the cover film.

The reference number H₁ in FIG. 4(n) represents the height of each bump84 ₁ above the surface of cover film 87, and T₁ in FIG. 1(g) representsthe thickness of cover film 17 into which bump 84 ₁ penetrates. Theheight H₁ of each bump 84 ₁ is greater than the thickness T₁ of coverfilm 87 (H₁>T₁).

First wiring layer 16 underlies cover film 17 in contact with bump 84 ₁.As ultrasonic wave is applied to the bump 84 ₁, the part of cover film17 between bump 84 ₁ and first wiring layer 16 is softened and anopening is formed. Bump 84 ₁ is pressed into the opening. The cover film17 forced by the bump 84 ₁ is risen around the opening. The referencenumber 95 in FIG. 7(b) represents the part of cover film 17 to be forcedby bump 84 ₁.

When the top of bump 84 ₁ comes into contact with first wiring layer 16and ultrasonic application continues in this state, the top of bump 84 ₁is ultrasonically bonded to first wiring layer 16.

When bump 84 ₁ is in contact with or connected to first wiring layer 16,first single-wiring layer board piece 10 placed on support 58 begins toultrasonically vibrate in synchronism with second single-wiring layerboard piece 80 ₁ so that bump 84 ₁ cannot pierce first wiring layer 16.

When bump 84 ₁ comes into contact with first wiring layer 16, cover film87 of second single-wiring layer board piece 80 ₁ comes into closecontact with cover film 17 of first single-wiring layer board piece 10.Therefore, if ultrasonic wave is applied to press second single-wiringlayer board piece 80 ₁ against first single-wiring layer board piece 10while directly heating second single-wiring layer board piece 80 ₁ by aheater in resonator 52 or platform 58 or heating second single-wiringlayer board piece 80 ₁ via first single-wiring layer board piece 10,heated cover film 87 develops adhesiveness to bond cover films 87, 17together.

As a result, first and second single-wiring layer board pieces 10, 80 ₁are bonded together into a single multilayer flexible wiring board 41.Electric connection between first and second wiring layers 16, 86 ₁ offirst and second single-wiring layer board piece 10, 80 ₁ is ensured viabumps 84 ₁.

As described above, the present invention allows wiring layers to beconnected to each other by using bumps to form openings withoutpreliminarily exposing the wiring layers.

The height H₁ of bump 84 ₁ should be greater than the thickness T₁ ofcover film 87 to be ultrasonically forced above first wiring layer 16 toensure connection between each bump 84 ₁ and first wiring layer 16.

First single-wiring layer board pieces were prepared by varying thethickness T₁ of cover film 17 above first wiring layer 16 and a secondsingle-wiring layer board piece having bumps 84 ₁ of 20 μm in height H₁was laminated by the process described above to prepare multilayerflexible wiring boards. Then the various thickness of cover film 17 wastested for the resistance at the connection zone. The relationshipbetween the thickness T₁ of cover film 17 and the resistance value atthe zone connected by bumps 84 ₁ is shown in the following Table 1.

In the following Table 1, the cover film thickness of “0” corresponds tothe case in which cover film 17 of first single-wiring layer board piece10 was opened to bring bumps into direct contact with the wiring layer.

TABLE 1 Bump height and connection resistance (bump height 20 μm)Thickness of 5 10 15 20 25 0 cover film T₁ (μm) Connection 0.5 0.5 0.5 ∞∞ 0.5 resistance (Ω) (open) (open)

During preparation of multilayer flexible wiring boards, a load of 3-7kg was applied per bump 84 ₁ under ultrasonic wave application.

The thickness of cover film 87 above second wiring layer 86 having bumps84 ₁ is 20 μm, and therefore, the height of bump 84 ₁ from second wiringlayer 86 is 40 μm. Bump 84 ₁ is in the form of a circle having a maximumdiameter of 150 μm. First wiring layer 16 was patterned in the form of acircle of 250 μm in diameter at the part to be connected to bump 84 ₁.

Table 1 shows that the connection resistance obtained by opening a coverfilm is reproduced when the bump height H₁ is greater than the thicknessof the resin film to be forced into, or the thickness of the resin filmabove the wiring layer is smaller than the height of bumps projectingfrom the resin film.

Next, the step of further laminating a single-wiring board piece tomultilayer flexible wiring board 41 is explained.

As shown in FIG. 8(a), a secondary piece of second single-wiring layerboard piece 80 ₂ is superposed on base film 89 ₁ of second single-wiringlayer board piece 80 ₁ constituting multilayer flexible wiring board 41shown in FIG. 7(c) with bumps 84 ₂ being in contact with said base film89 ₁, and head portion 54 of resonator 52 is brought into contact withbase film 89 ₂ of secondary piece of second single-wiring layer boardpiece 80 ₂.

When ultrasonic wave is applied to secondary piece of secondsingle-wiring layer board piece 80 ₂ under pressure in this state, bumps84 ₂ force and penetrate into base film 89 ₁ on the top of multilayerflexible wiring board 41.

The reference T₂ in FIG. 4(n) represents the thickness of base film 89of second single-wiring layer board piece above second wiring layer 86.

This thickness T₂ is smaller than the bump height H₁ and corresponds tothe thickness of base film 89 ₁ in contact with bump 84 ₂, so that bump84 ₂ penetrates into base film 89 ₁ at the site 96 located between bump84 ₂ and wiring layer 86 ₁ to connect bump 84 ₂ to second wiring layer86 ₁ underlying base film 89 ₁.

The reference number 42 in FIG. 8(b) represents thus formed multilayerflexible wiring board having a trilayer structure. First wiring layer 16and two other wiring layers 86 ₁, 86 ₂ are connected via bumps 84 ₁, 84₂ to electrically connect desired wiring of a plurality of wiring layers16, 86 ₁, 86 ₂.

Although first and other wiring layers 16, 86 ₁, 86 ₂ and bumps 84₁, 84₂ consist of copper to provide direct ultrasonic connection via copperin the foregoing embodiments, either one or both of wiring layers andbumps may be coated with a metal having better ultrasonic connectivitythan copper such as a gold coat or solder coat.

Referring to FIG. 9(a), the assembly of base film 12 and first wiringlayer 16 in the state of FIG. 1(f) is first immersed into a gold platingsolution to form a gold-based metal coat 14 on the surface of at leastfirst wiring layer 16 by electroplating. The reference number 18represents a first wiring layer having metal coat 14 on the surface.

Then, a polyimide varnish is applied on first wiring layer 18 to imidateit into a cover film 17, whereby a first single-wiring layer board piece20 having metal coat 14 as shown in FIG. 9(b) is obtained.

FIG. 9(c) shows that a plurality of bumps 84 ₁ of second single-wiringlayer board piece 80 ₁ are in contact with cover film 17 of firstsingle-wiring layer board piece 20 and that head portion 54 of resonator52 is pressed against base film 89 ₁ of second single-wiring layer boardpiece 80 ₁.

When ultrasonic vibration is given to resonator 52 in this state toultrasonically vibrate bumps 84 ₁ in the direction parallel to thesurface of cover film 17, bumps 84 ₁ penetrate into cover film 17 untilthe tops of bumps 84 ₁ come into contact with metal coat 14.

When ultrasonic wave is applied while the tops of bumps 84 ₁ are pressedagainst metal coat 14, the tops of bumps 84 ₁ are ultrasonically bondedto metal coat 14. During ultrasonic connection, cover film 87 ₁ ofsecond single-wiring layer board piece 80 ₁ is pressed against thesurface of cover film 17 of first single-wiring layer board piece 20.Therefore, if cover film 87 ₁ of second single-wiring layer board piece80 ₁ is heated by a heater in resonator 52 or platform 58 to developadhesiveness of adhesive layer 87 ₁ b on the surface of cover film 87 ₁,first and second single-wiring layer board pieces 20, 80 ₁ are bondedtogether into a single multilayer flexible wiring board 42 as shown inFIG. 9(d).

Although metal coat 14 was provided on the side of first wiring layer 18in this example, it may also be provided on the top of bump 84 ₁.

Although an adhesive layer was used to adhere single-wiring layer boardpieces into a multilayer flexible wiring board in the foregoingembodiments, a multilayer flexible wiring board may also be formed onlyby connection force between bumps and wiring layers.

Although polyimide films were used as resin films in the foregoingembodiments, the present invention is not limited to these embodimentsbut also applicable to other rein films such as polyethylene films,polyester films, epoxy films, etc. Wiring layers may also include othermetals such as aluminum instead of copper.

Although a general-purpose ultrasonic manufacturing apparatus 50 wasused in the foregoing embodiments, the present invention also includesan ultrasonic manufacturing apparatus 60 in which central axis 63 ofultrasonic wave generator 61 and resonator 62 is inclined from thehorizontal direction as shown in FIG. 6.

In this ultrasonic manufacturing apparatus 60, head portion 64 ofresonator 62 is oblique to ultrasonic wave generator 61 and resonator62. Head portion 64 has a flat pressing face 69, which is designed to behorizontal when the assembly is obliquely fitted to guide posts 67 ₁, 67₂.

Although ultrasonic manufacturing apparatus 50 described before had toplace single-wiring layer board pieces 10, 80 on support 58, resonator62 cannot strike platform 68 or support 68 when the inclination ofcentral axis 63 from the horizontal direction is adjusted between 5° and60° in ultrasonic manufacturing apparatus 60. Thus, a large-area support68 can be used, whereby single-wiring layer board pieces 10, 80 can beeasily placed.

As has been described above, the present invention can simplify theprocess for manufacturing a multilayer flexible wiring board byconnecting bumps to wiring layers without providing openings in a resinfilm.

Although gold-based metal coat 14 was provided in the foregoingembodiments, either one or both of the surfaces of at least the tops ofbumps or the surface of the first wiring layer in contact with at leastthe tops of bumps may be coated with a metal material based on one ormore metals selected from gold, silver, platinum, palladium, tin, zinc,lead, nickel or iridium.

Next, an alternative multilayer flexible wiring board according to thepresent invention and a process for manufacturing it are explained.

Referring to FIG. 10(a), the reference number 101 represents a metalfilm consisting of a copper foil of 18 μm-30 μm in thickness having acarrier film 102 including a resin film applied to the bottom. Aphotosensitive film 103 is applied to the top of this metal film 101(FIG. 10(b)), and photosensitive film 103 is patterned by exposure anddevelopment (FIG. 10(c)).

Then, patterned photosensitive film 103 is used as a mask for alkalietching to pattern metal film 101 to form a first wiring layer 109 (FIG.10(d)). The reference 105 in FIG. 10(d) represents a groove formed bypatterning in first wiring layer 109 or a part segmenting the wiring.The top of carrier film 102 is exposed at the bottom of this groove 105.

Then, photosensitive film 103 is separated to expose first wiring layer109 (FIG. 10(e)), and a polyimide precursor solution is applied on itstop to fill groove 105 with the polyimide precursor solution. Imidationby heating in this state gives a base film 106 including a thermosettingpolyimide resin film (FIG. 10(f)). This base film 106 has a flatsurface. The reference number 104 in FIG. 10(f) represents asingle-wiring layer board piece having base film 106.

This single-wiring layer board piece 104 is placed as a work in anultrasonic manufacturing apparatus to form an opening in base film 106.

The reference 160 in FIG. 15 represents an ultrasonic manufacturingapparatus of the present invention used for forming an opening. Thisultrasonic manufacturing apparatus 160 comprises a cylindricalultrasonic wave generator 161, a resonator 162 applying ultrasonicvibration to a work, a platform 166 and two guide posts 167 ₁, 167 ₂.

Guide posts 167 ₁, 167 ₂ are upright on platform 166 and ultrasonic wavegenerator 161 is fitted to guide post 167 ₁, 167 ₂ in such a manner thatit can vertically move in a horizontal position.

One end of resonator 162 is fitted to an end of ultrasonic wavegenerator 161, while the other end is bent so that its end face 169 isparallel with central axis 181 of ultrasonic wave generator 161 andresonator 162.

FIG. 16 shows an enlarged view of head portion 164 of resonator 162.Head portion 164 has a pressing face 169, which is horizontallypositioned when ultrasonic wave generator 161 and resonator 162 arefitted to guide posts 167 ₁, 167 ₂ in such a manner that pressing face169 faces downward and central axis 181 is horizontal.

Pressing face 169 has a plurality of projections 165 each facingvertically downward when pressing face 169 is in a horizontal position.

A flat support 168 is mounted on platform 166 and a work (single-wiringlayer board piece 104) is placed on the top of support 168 with basefilm 106 to be opened upward, whereby pressing face 169 of resonator 162and base film 106 are faced in parallel to each other in a horizontalposition.

When an air cylinder 163 located over resonator 162 is activated so thatultrasonic wave generator 161 and resonator 162 vertically descend alongguide posts 167 ₁, 167 ₂, all the projections 165 on pressing face 169simultaneously come into contact with base film 106. Each projection 165comes into contact with base film 106 at vertical angles.

This state is shown in FIG. 11(g), in which each projection 165 onpressing face 169 has almost the same height H₃ from pressing face 169,so that each projection 165 almost simultaneously comes into contactwith base film 106 when resonator 162 vertically descends.

When ultrasonic wave generator 161 is activated while each projection165 is in contact with base film 106, the resulting ultrasonic vibrationis transmitted to each projection 165 via resonator 162.

The direction of ultrasonic vibration generated in ultrasonic wavegenerator 161 has almost no components vertical to ultrasonic wavegenerator 161 but consists of only components parallel to central axis181 of ultrasonic wave generator 161. When ultrasonic vibrationgenerated in horizontal ultrasonic wave generator 161 is transmitted toprojection 165, each projection 165 ultrasonically vibrates in thehorizontal direction.

Each projection 165 ultrasonically vibrates while it is pressed againstbase film 106 by air cylinder 163, but single-wiring layer board piece104 to be worked remains fixed to support 168 by frictional force.

Thus, projection 165 softens base film 106 by ultrasonic vibrationenergy and each projection 165 forces into base film 106. Eachprojection 165 having a semispherical shape here forces into base film106 with a curved face forming the surface of each projection 165 toform an elliptic recess having a major axis in the vibration directionof ultrasonic wave. The reference number 107 in FIG. 11(h) representssuch a recess. A part of base film 106 forced by projection 165 is risenaround the recess 107.

The position of each opening 107 to be formed in base film 106 ispredetermined and each projection 165 is located at the positioncorresponding to each opening 107. First wiring layer 109 but not groove105 exists under each projection 165 because first wiring layer 109should be exposed at the bottom of the opening 107 to be formed in basefilm 106.

The height H₃ of each projection 165 here is greater than the thicknessT₃ of base film 106 (H₃>T₃), so that the top of each projection 165reaches first wiring layer 109 before pressing face 169 comes intocontact with base film 106, as forcing proceeds.

This state is shown in FIG. 11(i). Projection 165 under ultrasonicvibration is pressed against first wiring layer 109 to ultrasonicallyvibrate first wiring layer 109 in synchronism with projection 165, sothat no more ultrasonic vibration energy is applied to first wiringlayer 109 to stop forcing. As a result, an opening 108 is formed in basefilm 106 with first wiring layer 109 exposed at the bottom. The numberof openings 108 is identical to the number of projections 165.

After openings 108 have been formed, ultrasonic wave generator 161 isstopped and air cylinder 163 is activated so that resonator 162 andultrasonic wave generator 161 ascend along guide posts 167 ₁, 167 ₂ toremove single-wiring layer board piece 104 having openings 108 fromsupport 168. FIG. 12(j) shows single-wiring layer board piece 104 inthis state. If one wishes to continuously form openings, processedsingle-wiring layer board piece 104 may be replaced by an unprocessedflexible wiring board, which is then forced by ultrasonic vibration.

FIG. 19(a) is a perspective view of opening 108 formed in base film 106using semispherical projection 165. FIG. 19(b) is a plan view of opening108 seen from the upside of base film 106. The direction of ultrasonicvibration is the direction of major diameter L₁, with major diameterL₁>minor diameter L₂.

The relationship between the size of projection 165 and the size ofopening 108 formed in base film 106 is shown in the following Table 2.

TABLE 2 Relationship between projection diameter and opening sizeConnection means Ultrasonic Ultrasonic Ultrasonic Ultrasonic UltrasonicEtching wave wave wave wave wave Thickness of  10  25  25 25  50  20base film (μm) Projection diameter (μm) 150 150 100 50 150 (Opening inmask) 150 Opening size (μm) 152 155 105 52 Not opened 140 Evaluationresult Pass Pass Pass Pass Fail Pass (Projection height 40 μm)

The frequency of ultrasonic vibration applied to projection 165 is 40kHz, and the time for forcing into base film 106 using projection 165during application of ultrasonic wave is one minute. Opening sizes areshown as maximum lengths.

Table 2 shows that the size of opening 108 increases as the diameter ofprojection 165 increases.

In the experiments of Table 2 using projection 165 having a height H₃ of40 μm, the result was a fail or any opening 108 was not formed when thethickness T₃ of base film 106 exceeds the height H₃ of projection 165.This Table 2 also shows the size of an opening formed by conventionaletching and the result of a connection test on a multilayer flexiblewiring board constructed with such openings and bumps.

Although said projection 165 has a semispherical top to form an ellipticopening 108, a plurality of rectangular projections 165′ as shown inFIG. 19(c) may be provided on pressing face 169 and pressed against basefilm 106 at vertical angles to apply ultrasonic wave to force into basefilm 106, thereby forming a rectangular opening 108′ as shown in FIG.19(d).

Then, carrier film 102 of single-wiring layer board piece 104 havingopenings 108 is separated to expose the bottom of first wiring layer 109(FIG. 12(k)). A polyimide precursor solution is applied on exposed firstwiring layer 109 with base film 106 downward and first wiring layer 109upward (inversion of FIG. 12(k)) followed by imidation by heating toform a cover film 110 including a polyimide film (FIG. 12(l)).

Then, this cover film 110 is forced with ultrasonic manufacturingapparatus 160 described above by the same process as described above toform a plurality of openings, whereby a first single-wiring layer boardpiece 122 is obtained (FIG. 12(m)). The reference number 111 in FIG.12(m) represents such an opening. First wiring layer 109 is exposed atthe bottom of opening 111.

Next, a process for manufacturing a flexible wiring board of multilayerstructure using this first single-wiring layer board piece 122 isexplained.

The reference number 116 in FIG. 13(a) represents a second single-wiringlayer board piece comprising a base film 115, a second wiring layer 113provided on said base film 115, a plurality of bumps 117 upright on saidsecond wiring layer 113, and a cover film 114 applied on the top ofsecond wiring layer 113.

Base film 115 and cover film 114 include a thermosetting polyimideresin. The top of each bump 117 projects from the top of cover film 114.

Base film 115 has a plurality of openings 118 with second wiring layer113 exposed at the bottom.

Each of a plurality of bumps 117 is located at the positioncorresponding to opening 108 in said first single-wiring layer boardpiece 122.

Each bump 117 on this second single-wiring layer board piece 116 isopposed to opening 108 in said first single-wiring layer board piece 122with interposition of adhesive film 112 therebetween to bring each bump117 into contact with first wiring layer 109 exposed at the bottom ofopening 108.

When bump 117 having a solder coat on the surface and adhesive film 112are heated, bumps 117 and first wiring layer 109 are electricallyconnected via molten solder coat, and two single-wiring layer boardpieces 122, 116 are bonded together via adhesive film 112 developingadhesive force into a multilayer flexible wiring board 123 shown in FIG.13(b).

An additional single-wiring layer board piece having bumps can be bondedto second wiring layer 113 exposed at the bottom of opening 118 in basefilm 115 of this multilayer flexible wiring board 123 by bringing saidbumps into contact with second wiring layer 113 exposed at the bottom ofopening 118 to continuously superpose single-wiring layer board pieces.

Openings 111 formed in cover film 110 of first single-wiring layer boardpiece 122 can be used for connection with bumps of semiconductor devicesor as connection terminals to other electric circuits.

Although openings 108, 111 were formed in base films 106, and cover film110 on both sides of first wiring layer 109 in first single-wiring layerboard piece 122 according to the foregoing embodiment, either one of thebase film 106 or cover film 110 of first wiring layer 109 may be openedby ultrasonic vibration to expose the metal film at the bottom accordingto the present invention.

Although first wiring layer 109 was patterned and then openings 108, 111were formed in the foregoing embodiment, base film 106 may be opened toexpose the metal film at the bottom before the metal film is patterned.

Next, an alternative ultrasonic manufacturing apparatus more suitablefor forming an opening is explained.

Referring to FIG. 17, the reference number 170 represents an ultrasonicmanufacturing apparatus designed to improve ultrasonic manufacturingapparatus 160 used in the foregoing embodiment.

Similarly to ultrasonic manufacturing apparatus 160 described above,this ultrasonic manufacturing apparatus 170 comprises a cylindricalultrasonic wave generator 171, a resonator 172 applying ultrasonicvibration to a work, a platform 176 and two guide posts 177 ₁, 177 ₂.

Guide posts 177 ₁, 177 ₂ in this ultrasonic manufacturing apparatus 170are also upright on platform 176, but in contrast to ultrasonicmanufacturing apparatus 160 described above, ultrasonic wave generator171 is obliquely fitted to guide posts 177 ₁, 177 ₂.

Resonator 172 is fixed to an end of ultrasonic wave generator 171 at oneend and has a pressing face 179 at the other end. FIG. 18 shows anenlarged view of resonator 172. Pressing face 179 is flat but has aplurality of projections 175 vertically upright on the surface.

The head portion of resonator 172 is bent so that pressing face 179 isinclined at an angle from central axis 182 of ultrasonic wave generator171 and resonator 172. In this FIG. 18, the inclination of pressing face179 from central axis 182 is expressed as θ.

Thus, the surface 179 of head portion of resonator 172 becomeshorizontal if ultrasonic wave generator 171 is fitted to guide posts 177₁, 177 ₂ with central axis 182 of ultrasonic wave generator 171 beinginclined at an angle θ from the horizontal direction. Each projection175 faces vertically downward when pressing face 179 is horizontal.

After pressing face 179 is thus positioned, a single-wiring layer boardpiece 104 to be worked is placed on support 178 on platform 176 andultrasonic wave generator 171 and resonator 172 are allowed tovertically descend by air cylinder 173, whereby the top of projection175 comes into contact with base film 106 on the top of single-wiringlayer board piece 104 at vertical angles, similarly to the foregoingembodiment using ultrasonic manufacturing apparatus 160.

In this ultrasonic manufacturing apparatus 170, ultrasonic vibrationgenerated by ultrasonic wave generator 171 has components parallel andvertical to central axis 182 of ultrasonic wave generator 171 so thatprojection 175 ultrasonically vibrates only in the horizontal directionwhen ultrasonic wave generator 171 is inclined and pressing face 179 ofresonator 172 is horizontal.

Thus, when projection 175 is ultrasonically vibrated while it is pressedagainst the top of base film 106, projection 175 forces into base film106 in the same manner as ultrasonic manufacturing apparatus 160 wasused before.

This ultrasonic manufacturing apparatus 170 has high workability,because ultrasonic wave generator 171 and resonator 172 are inclined toprevent resonator 172 from coming into contact with a work.

The area of support 178 may be enlarged to form an opening in alarge-area work. Although ultrasonic manufacturing apparatus 160 in theprevious embodiment had a workable range of about 20-30 mm, thisultrasonic manufacturing apparatus 170 substantially has no limit. Theinclination between resonator 172 and pressing face 179, i.e. the angleof central axis 182 from the horizontal direction should be greater than0° (horizontal position), but typically between 5° and 60°, desirably 5°and 30°.

The following Table 3 shows ultrasonic vibration components (horizontaland vertical components) applied to projection 175 and the connectionresults. The reference to “horizontal” in the design of resonator(inclination of 0° from the horizontal direction) corresponds tohorizontal ultrasonic manufacturing apparatus 160 described above.Horizontal means the direction of axis X and vertical means thedirection of axis Y in FIG. 18.

TABLE 3 Ultrasonic vibration components and connection resultsInclination of resonator from 15 10 15 30  0  0 15 the horizontaldirection (°) (Horizontal) (Horizontal) Design of resonator ObliqueOblique Oblique Oblique Horizontal Horizontal Horizontal Frequency of 4040 20 20 40 20 20 ultrasonic vibration (kHz) Horizontal amplitude (μm)36 15 18 20 36 18 12 Vertical amplitude (μm)  0  0  0  0  0  0  5Evaluation of connection result Pass Pass Pass Pass Pass Pass Fail

This Table 3 shows that inclusion of vertical vibration componentscauses connection failure.

Although openings were formed in cured polyimide films using ultrasonicmanufacturing apparatus 160, 170 in the foregoing embodiments, thepresent invention is not limited to polyimide films but also applicableto form an opening in other rein films such as polyester films, epoxyfilms, etc.

Although resonators 162, 172 and projections 165, 165′, 175 were made ofiron and projections 165, 165′, 175 were formed by discharge-processingthe head portions of resonators 162, 172, ultrasonic manufacturingapparatus of the present invention are not limited to these embodimentsbut also include those made of titanium or other metals.

The height T of each projection 165, 165′, 175 may be leveled preferablyby polishing after discharge process. Each projection 165, 165′, 175 maybe coated on the surface to improve durability.

A plurality of projections 165, 165′, 175 may be provided or a singleone may be provided on the surfaces 169, 179 of end portions.

Top shape of each projection 165, 165′ and 175 may be formed semisphereor flat plane. When the shape is formed plane, the plane may form circleor rectangle. When the top shape of projection formed semisphere orplane circle, it is preferable that the diameter is between 100 μm and500 μm. Therefore, the sizes for cross sectional area direction parallelto single-wiring layer board piece of projection 165, 165′ and 175 arebetween 0.79×10⁻⁸ m² and 19.6×10⁻⁸ m². When a diameter of bump to beconnected is between 250 μm and 500 μm, it is also preferable that thediameter of each projection is same as the diameter of bump or more.

As has been described, the present invention does not use any etchingsolution to form an opening, thus eliminates the need of solutionmanagement and simplifies the process to improve productivity. Theresulting opening also has high precision.

Multilayer flexible wiring boards can also be constructed without usingsaid adhesive film 112.

Referring to FIG. 14(a), second single-wiring layer board piece 90having cover film 87 developing adhesiveness at the surface upon heatingis arranged in parallel with first single-wiring layer board piece 122having openings 111 formed by ultrasonic manufacturing apparatus 170.

This second single-wiring layer board piece 90 is identical to secondsingle-wiring layer board piece 80 shown in FIG. 4(n) and has aplurality of bumps 84 each provided at the location corresponding toeach of a plurality of openings 108 in base film 106 of firstsingle-wiring layer board piece 122.

When each bump 84 is brought into contact with first wiring layer 109exposed at the bottom of opening 108 and heated, cover film 87 of secondsingle-wiring layer board piece 90 develops adhesiveness at the surfaceso that it is bonded to base film 106 of first single-wiring layer boardpiece 122 to give a multilayer flexible wiring board 125 as shown inFIG. 14(b).

This second single-wiring layer board piece 90 has openings 119 in basefilm 89, and second wiring layer 86 is exposed at the bottom of opening119.

Therefore, bumps of an additional single-wiring layer board piece can bebrought into contact with second wiring layer 86 exposed at the bottomof opening 119 to further superpose the additional single-layer wiringboard.

As has been described, openings of multilayer flexible wiring boards ofthe present invention are formed by bringing bumps of a single-wiringlayer board piece or projections of an ultrasonic manufacturingapparatus into contact with a resin film and applying ultrasonic wave tothem under pressure without patterning the resin film by etching.

The resin film to be ultrasonically opened should suitably consist of athermosetting resin and preferably be cured by preheating beforeopenings are ultrasonically formed. If a polyimide resin is used, theresin should preferably be coated with a polyimide varnish followed byimidation to form a resin film to be opened.

Imidation may not be completed, but a semicured polyimide film may beultrasonically opened and then completely cured by reheating.

Alternatively, a polyimide film applied with a resin material and driedmay be ultrasonically opened, and then cured.

Ultrasonic manufacturing apparatus of the present invention should haveprojections in the number corresponding to the number of openings,because they are designed to form one opening by one projection.

If the array pattern of openings in a resin film to be opened is dividedin a plurality of patterns and a head portion is provided withprojections at the locations corresponding to each pattern, ultrasonicwave can be applied in a plurality of shots to form a plurality ofopenings on a single resin film.

The top of each projection should preferably be almost centered in anopening to be formed, because the opening becomes larger than thediameter of the projection when it is formed by applying ultrasonicvibration to the projection pressed against a resin film to force intoit.

1. An ultrasonic manufacturing apparatus comprising an ultrasonic wavegenerator generating ultrasonic vibration and a resonator transmittingsaid ultrasonic vibration, wherein said resonator has a plurality ofprojections capable of simultaneously coming into contact with a flatsurface of a work, and wherein each projection has a size expressed as across sectional area parallel to said flat surface of said work of19.6×10⁻⁸ m² or less at maximum.
 2. The ultrasonic manufacturingapparatus according to claim 1 wherein an ultrasonic wave vibrating in adirection parallel to said flat surface of said work is applied to saideach projection.
 3. The ultrasonic manufacturing apparatus according toclaim 1 wherein said ultrasonic wave generator is positioned oblique tosaid flat surface of said work.
 4. The ultrasonic manufacturingapparatus according to claim 1 suitable for forming a plurality ofopenings in a first single-wiring layer board piece having a firstpatterned wiring layer and a first resin film in close contact with saidfirst patterned wiring layer, wherein said each projection is providedat the location corresponding to the location of each bump on a secondsingle-wiring layer board piece to be bonded to said first single-wiringlayer board piece.
 5. The ultrasonic manufacturing apparatus accordingto claim 4 wherein said resonator is replaceable.